ASML Netherlands B.V. patent applications published on October 10th, 2024
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Contents
- 1 Patent applications for ASML Netherlands B.V. on October 10th, 2024
- 1.1 A METHOD OF MONITORING A MEASUREMENT RECIPE AND ASSOCIATED METROLOGY METHODS AND APPARATUSES (18575518)
- 1.2 APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT (18578780)
- 1.3 METHOD OF PROCESSING A SAMPLE, AND CHARGED PARTICLE ASSESSMENT SYSTEM (18748694)
- 1.4 DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPARATUS, AND METHOD (18743049)
- 1.5 CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEASURING METHOD, AND MONITORING METHOD (18748758)
- 1.6 CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD (18743011)
- 1.7 METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGED PARTICLE INSPECTION SYSTEM, METHOD OF PROCESSING A SAMPLE, ASSESSMENT METHOD (18744367)
Patent applications for ASML Netherlands B.V. on October 10th, 2024
A METHOD OF MONITORING A MEASUREMENT RECIPE AND ASSOCIATED METROLOGY METHODS AND APPARATUSES (18575518)
Main Inventor
Giulio BOTTEGAL
APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT (18578780)
Main Inventor
Lucas Christiaan Johan HEIJMANS
METHOD OF PROCESSING A SAMPLE, AND CHARGED PARTICLE ASSESSMENT SYSTEM (18748694)
Main Inventor
Jurgen VAN SOEST
DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPARATUS, AND METHOD (18743049)
Main Inventor
Herre Tjerk STEENSTRA
CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEASURING METHOD, AND MONITORING METHOD (18748758)
Main Inventor
Yan REN
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD (18743011)
Main Inventor
Marijke SCOTUZZI
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGED PARTICLE INSPECTION SYSTEM, METHOD OF PROCESSING A SAMPLE, ASSESSMENT METHOD (18744367)
Main Inventor
Tzu-Chao CHEN
