20240012370. ADAPTIVE FUZZY CONTROLLER simplified abstract (Advanced Energy Industries, Inc.)

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ADAPTIVE FUZZY CONTROLLER

Organization Name

Advanced Energy Industries, Inc.

Inventor(s)

Chad S. Samuels of Fort Collins CO (US)

ADAPTIVE FUZZY CONTROLLER - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240012370 titled 'ADAPTIVE FUZZY CONTROLLER

Simplified Explanation

The abstract of this patent application describes a method for controlling a parameter in a plasma processing system using fuzzy control systems and methods. The method involves receiving a reference signal that defines target values for the controlled parameter and obtaining a measure of the parameter at the output. A fuzzy controller then provides a control signal to adjust at least one actuator based on the reference signal and the measured parameter. The membership functions and rule base of the fuzzy controller are adapted while controlling the system based on an estimated model parameter tensor, the reference signal, the measured parameter, and the control signal.

  • The patent application describes a method for controlling a parameter in a plasma processing system using fuzzy control systems and methods.
  • The method involves receiving a reference signal that defines target values for the controlled parameter and obtaining a measure of the parameter at the output.
  • A fuzzy controller is used to provide a control signal to adjust at least one actuator based on the reference signal and the measured parameter.
  • The membership functions and rule base of the fuzzy controller are adapted while controlling the system based on an estimated model parameter tensor, the reference signal, the measured parameter, and the control signal.

Potential applications of this technology:

  • This technology can be applied in plasma processing systems used in various industries such as semiconductor manufacturing, surface treatment, and material synthesis.
  • It can be used to control parameters such as temperature, pressure, flow rate, and composition in plasma processing systems.

Problems solved by this technology:

  • Fuzzy control systems provide a more flexible and adaptive approach to controlling parameters in plasma processing systems compared to traditional control methods.
  • The adaptation of membership functions and rule base allows the controller to adjust its behavior based on the specific characteristics of the system being controlled.

Benefits of this technology:

  • Improved control accuracy and stability in plasma processing systems.
  • Increased flexibility and adaptability to different system conditions and requirements.
  • Reduced manual tuning and calibration efforts, leading to cost and time savings in system operation.


Original Abstract Submitted

fuzzy control systems and methods are disclosed. a method includes receiving a reference signal defining target values for a parameter that is controlled at an output of the plasma processing system and obtaining a measure of the parameter that is controlled at the output. a fuzzy controller provides a control signal to adjust at least one actuator based at least upon the reference signal and the measure of the controlled parameter. in addition, output membership functions of the fuzzy controller, input membership functions of the fuzzy controller, and a rule base of the fuzzy controller are adapted while controlling an output of a system based at least upon the based at least upon an estimated model parameter tensor, the reference signal and the measure of the controlled parameter, and the control signal.

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