20240012341. ELECTROSTATIC CLAMP simplified abstract (ASML Netherlands B.V.)

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ELECTROSTATIC CLAMP

Organization Name

ASML Netherlands B.V.

Inventor(s)

Gustaaf Galein Van Eden of Utrecht (NL)

Cung Vuong Nguyen of Roermond (NL)

Ksenia Sergeevna Makarenko of Veldhoven (NL)

ELECTROSTATIC CLAMP - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240012341 titled 'ELECTROSTATIC CLAMP

Simplified Explanation

The abstract of this patent application describes an electrostatic clamp for holding an object using electrostatic force. The clamp consists of a dielectric member with conductive burls protruding from its surface, creating a plane where the object is held. A conductive element connects the burls and is located within trenches on the surface of the dielectric member. The abstract also mentions a method of manufacturing the electrostatic clamp.

  • The electrostatic clamp uses electrostatic force to hold objects securely.
  • It includes a dielectric member with conductive burls that define a plane for object placement.
  • A conductive element connects the burls and is located within trenches on the dielectric member's surface.
  • The patent application also covers the manufacturing method for the electrostatic clamp.

Potential Applications

  • Manufacturing and assembly processes where objects need to be securely held in place.
  • Electronics manufacturing, where delicate components can be held without physical contact.
  • Precision machining, where objects can be clamped without distortion or damage.

Problems Solved

  • Provides a non-contact method of holding objects, eliminating the need for physical clamps or fixtures.
  • Prevents damage or distortion to delicate objects during handling or manufacturing processes.
  • Offers a secure and stable grip on objects, reducing the risk of slippage or movement.

Benefits

  • Non-contact holding method allows for easy and quick placement and removal of objects.
  • Eliminates the need for physical clamps or fixtures, reducing setup time and costs.
  • Provides a secure and stable grip, ensuring precise positioning and reducing the risk of errors or accidents.
  • Protects delicate objects from damage or distortion during handling or manufacturing processes.


Original Abstract Submitted

an electrostatic clamp for holding an object by electrostatic force is disclosed. the electrostatic clamp comprises a dielectric member having a plurality of conductive burls extending from a surface to define a plane in which the object is held, and a conductive element extending between and connecting the plurality of burls. the conductive element is disposed within one or more trenches formed on the surface of the dielectric member. also disclosed is a method of manufacturing the electrostatic clamp.