18828170. SEMICONDUCTOR DEVICE (SAMSUNG ELECTRONICS CO., LTD.)
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18828170 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device includes a substrate, a bit line extending in a first direction on the substrate, a first vertical channel pattern and a second vertical channel pattern on the bit line, a back gate electrode between the first vertical channel pattern and the second vertical channel pattern and extending in a second direction perpendicular to the first direction across the bit line, a first word line extending in the second direction from one side of the first vertical channel pattern, a second word line extending in the second direction from other side of the second vertical channel pattern, and a contact pattern connected to each of the first vertical channel pattern and the second vertical channel pattern. When viewed from a cross-sectional view, each of the first vertical channel pattern and the second vertical channel pattern have a trapezoidal shape with the long sides facing each other.