18820919. TEMPERATURE OFFSET AND ZONE CONTROL TUNING (Applied Materials, Inc.)
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
Organization Name
Inventor(s)
Shankar Muthukrishnan of Los Gatos CA US
Wolfgang R. Aderhold of Cupertino CA US
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
This abstract first appeared for US patent application 18820919 titled 'TEMPERATURE OFFSET AND ZONE CONTROL TUNING
Original Abstract Submitted
A method for controlling temperature in a thermal processing chamber includes determining temperature sensitivity profiles of one or more heating elements or zones for a substrate based on measurements of the substrate. The method also includes selecting a temperature offset value for each of the one or more heating elements or zones. The method also includes simulating the adjustment of each of the one or more zone offset values to a respective final adjusting value that achieves a predetermined goal. The method further includes adjusting the temperature offset values for each of the one or more heating elements to the respective final adjusted values.