18820492. PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS (Tokyo Electron Limited)

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PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS

Organization Name

Tokyo Electron Limited

Inventor(s)

Toshihiro Kitao of Hokkaido (JP)

Jun Shinagawa of Fremont CA (US)

Masato Kazui of Hokkaido (JP)

Makoto Igarashi of Hokkaido (JP)

Toshihiro Ohno of Hokkaido (JP)

PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS

This abstract first appeared for US patent application 18820492 titled 'PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS



Original Abstract Submitted

The profile detecting method includes: detecting a specific shape included in a detection target image from the detection target image including the specific shape using a model that has learned a learning image including the specific shape and information regarding the specific shape included in the learning image; and outputting shape information of the detected specific shape.