18800442. SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF (SEMES CO., LTD.)
SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF
Organization Name
Inventor(s)
Jun Seok Park of Gyeonggi-do KR
Yong Jun Bae of Chungcheongnam-do KR
Ja Myung Gu of Chungcheongnam-do KR
Asatur Khurshudyan of Chungcheongnam-do KR
Shant Arakelyan of Chungcheongnam-do KR
SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF
This abstract first appeared for US patent application 18800442 titled 'SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF
Original Abstract Submitted
Provided is a substrate processing apparatus. The substrate processing apparatus of the present invention comprises a support unit provided in a processing space for processing a substrate and for supporting the substrate, wherein the support unit comprises a puck having a first thermal conductivity and having a concave groove formed thereon; and a block provided in the concave groove and having a second thermal conductivity different from the first thermal conductivity.