18773920. SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS (Micron Technology, Inc.)
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SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS
Organization Name
Inventor(s)
John Hopkins of Meridian ID (US)
Jordan D. Greenlee of Boise ID (US)
SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS
This abstract first appeared for US patent application 18773920 titled 'SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS
Original Abstract Submitted
A semiconductor manufacture reclamation system and associated methods are shows. Example systems and methods include semiconductor processing machinery and a reaction chamber coupled along a path of a waste gas vent. Systems and methods are shown that include an amount of silicon to react with a waste gas including tungsten.