18748864. MAGNETIC SENSOR DEVICE (TDK CORPORATION)
Contents
MAGNETIC SENSOR DEVICE
Organization Name
Inventor(s)
MAGNETIC SENSOR DEVICE
This abstract first appeared for US patent application 18748864 titled 'MAGNETIC SENSOR DEVICE
Original Abstract Submitted
A magnetic sensor device includes a support substrate and a sensor substrate fixed to the support substrate . The sensor substrate includes a first surface B facing the support substrate and a second surface A that is located on an opposite side to the first surface B and that is provided with a functional film including a plurality of magnetic detection elements E, a hole portion is formed in the first surface B, an outline O of the hole portion includes at least one corner C, C, C . . . , at least one corner C, C, C . . . includes a first corner C that overlaps at least one of the plurality of magnetic detection elements E in a plan view seen in a plane-normal direction Z from the second surface A to the first surface B, and the first corner C has a radius of curvature of 5 μm or more.
