18747490. FLUID SENSOR SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.)
Contents
FLUID SENSOR SYSTEM
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Inventor(s)
FLUID SENSOR SYSTEM - A simplified explanation of the abstract
This abstract first appeared for US patent application 18747490 titled 'FLUID SENSOR SYSTEM
The present disclosure introduces a fluid sensor and a method for its fabrication, featuring a substrate with a recess, a protection layer, a first conductive layer, a membrane, and a through via.
- The fluid sensor includes a substrate with a recess and a protection layer lining the recess.
- A first conductive layer is present over the substrate and lines the protection layer in the recess.
- A membrane covers the second surface of the substrate and connects to the first conductive layer and protection layer.
- A through via is connected to the recess and penetrates the first conductive layer.
Potential Applications: - This technology can be used in various industries such as automotive, medical, and environmental monitoring for fluid detection and analysis.
Problems Solved: - The fluid sensor addresses the need for accurate and reliable fluid sensing in different applications. - It provides a protective layer to prevent damage to the sensor components.
Benefits: - Improved accuracy and sensitivity in fluid sensing. - Enhanced durability and longevity of the sensor. - Cost-effective fabrication process.
Commercial Applications: - This technology can be utilized in automotive fuel systems, medical devices for drug delivery, and environmental monitoring equipment for water quality assessment.
Questions about Fluid Sensor Technology: 1. How does the protection layer contribute to the performance of the fluid sensor? - The protection layer enhances the durability and reliability of the sensor by preventing damage to the sensitive components.
2. What industries can benefit the most from the implementation of this fluid sensor technology? - Industries such as automotive, medical, and environmental monitoring can greatly benefit from the accurate fluid sensing capabilities of this technology.
Original Abstract Submitted
The present disclosure provides a fluid sensor and a method for fabricating a fluid sensor. The fluid sensor includes a substrate having a first surface, a second surface opposite to the first surface and a recess recessed from the first surface, a protection layer over the first surface and lining the recess, wherein the protection layer includes a material different from that of the substrate, a first conductive layer over the first surface of the substrate and lining the protection layer in the recess, a membrane over the second surface of the substrate and contacting the first conductive layer and the protection layer at the second surface of the substrate, and a through via connected to the recess and penetrating the first conductive layer.
