18747417. INTEGRATED SUBSTRATE MEASUREMENT SYSTEM simplified abstract (Applied Materials, Inc.)

INTEGRATED SUBSTRATE MEASUREMENT SYSTEM

Organization Name

Applied Materials, Inc.

Inventor(s)

Patricia Schulze of Giddings TX (US)

Gregory John Freeman of Austin TX (US)

Michael Kutney of Santa Clara CA (US)

Arunkumar Ramachandraiah of Bengaluru (IN)

Chih Chung Chou of San Jose CA (US)

Zhaozhao Zhu of Milpitas CA (US)

Ozkan Celik of Cedar Park TX (US)

INTEGRATED SUBSTRATE MEASUREMENT SYSTEM - A simplified explanation of the abstract

This abstract first appeared for US patent application 18747417 titled 'INTEGRATED SUBSTRATE MEASUREMENT SYSTEM

Simplified Explanation: The optical measurement device described in the patent application includes a substrate holder, actuators to move the holder, sensors to capture measurements of target positions on the substrate, and a processing device to control the actuators and process the measurements.

• The device has a substrate holder to secure the substrate.
• It includes actuators to move the substrate holder along different axes.
• There are sensors to capture measurements of target positions on the substrate.
• A processing device controls the actuators and processes the captured measurements.
• The components are mounted on a plate that provides vibration isolation.

Key Features and Innovation:

• Integration of substrate holder, actuators, sensors, and processing device on a single plate.
• Vibration isolation provided by the plate for accurate measurements.
• Ability to capture measurements of target positions on the substrate using multiple sensors.
• Control of actuators and processing of measurements by a single processing device.

Potential Applications: The technology can be used in industries such as semiconductor manufacturing, quality control, and research laboratories for precise optical measurements on substrates.

Problems Solved: The device addresses the challenge of accurately measuring target positions on substrates while providing vibration isolation for stable measurements.

Benefits:

• Improved accuracy in optical measurements on substrates.
• Enhanced stability and reliability of measurements.
• Simplified setup with integrated components on a single plate.

Commercial Applications: The technology can be applied in industries requiring precise optical measurements, such as semiconductor manufacturing, biotechnology, and materials science research.

Questions about Optical Measurement Device: 1. How does the vibration isolation provided by the plate impact the accuracy of measurements? 2. What are the potential cost savings for industries using this integrated optical measurement device?

Frequently Updated Research: Ongoing research may focus on enhancing the processing algorithms for improved measurement accuracy and exploring new applications in different industries.

Original Abstract Submitted

An optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or more first measurements or images of a first plurality of target positions on the substrate, and a second sensor to generate one or more second measurements of a second plurality of target positions on the substrate. The optical measurement device further comprises a plate, wherein the substrate holder, the plurality of actuators, the first sensor and the second sensor are each mounted to the plate, and wherein the plate provides vibration isolation from a factory interface to which the optical measurement device mounts. The optical measurement device further comprises a processing device that executes instructions to control the plurality of actuators and process the first measurements or images and the second measurements.