18740567. MANUFACTURING DEVICE OF DISPLAY DEVICE (Japan Display Inc.)
Contents
MANUFACTURING DEVICE OF DISPLAY DEVICE
Organization Name
Inventor(s)
Takanobu Takenaka of Tokyo (JP)
Hirofumi Mizukoshi of Tokyo (JP)
MANUFACTURING DEVICE OF DISPLAY DEVICE
This abstract first appeared for US patent application 18740567 titled 'MANUFACTURING DEVICE OF DISPLAY DEVICE
Original Abstract Submitted
According to one embodiment, a manufacturing device includes a main manufacturing line and a sub-line. The main manufacturing line includes a preprocessing portion, an in-line first evaporation device, a first CVD device for forming a first inorganic insulating layer of a sealing layer, a dry etching device for reducing a thickness of the first inorganic insulating layer, and a second CVD device for forming a second inorganic insulating layer of the sealing layer. The sub-line forms a detour which is different from the main manufacturing line as a conveyance path for conveying a processing substrate. The main manufacturing line and the sub-line form a loop conveyance path.
