18739563. SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS (ASM IP Holding B.V.)
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SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Organization Name
Inventor(s)
Ippei Yanagisawa of Sagamihara-shi (JP)
Takashi Hamaguchi of Kawasaki-shi (JP)
SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
This abstract first appeared for US patent application 18739563 titled 'SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Original Abstract Submitted
A substrate supporting apparatus includes: a susceptor configured for a substrate to be place on; and a moving mechanism that is connected to the susceptor and configured to rotate the susceptor about a central axis of the susceptor, the central axis extending in a vertical direction, wherein the moving mechanism is configured to move the susceptor further in a direction extending in an imaginary horizontal plane perpendicular to the central axis.
