18701439. VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING (LAM RESEARCH CORPORATION)
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VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING
Organization Name
Inventor(s)
Aaron Blake Miller of West Linn OR (US)
Gopinath Bhimarasetti of Portland OR (US)
VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING
This abstract first appeared for US patent application 18701439 titled 'VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING
Original Abstract Submitted
A valve manifold for use in a semiconductor processing tool comprises a manifold body, a purge gas inlet, a process gas inlet, a manifold outlet, a divert outlet, a first valve interface, a second valve interface, and a third valve interface. The first valve interface and the third valve interface each includes a first port, and a second port. The second valve interface includes a first port, a second port, a third port, and a fourth port.
