18672479. GATE VALVE AND DRIVING METHOD simplified abstract (Tokyo Electron Limited)
Contents
GATE VALVE AND DRIVING METHOD
Organization Name
Inventor(s)
Norihiko Amikura of Miyagi (JP)
GATE VALVE AND DRIVING METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18672479 titled 'GATE VALVE AND DRIVING METHOD
The abstract describes a gate valve in a vacuum processing apparatus that opens and closes a first chamber's opening. The valve element can be moved by a drive to open or close the opening, with the help of gas pressure from two gas lines controlled by a switching valve.
- Valve element opens and closes the first chamber's opening.
- Drive moves the valve element between opening and closing positions.
- Gas pressure from two gas lines controlled by a switching valve helps in the movement of the valve element.
- Valve element is held at the closing position by gas pressure from the second gas line.
Potential Applications: - Vacuum processing equipment - Semiconductor manufacturing - Thin film deposition processes
Problems Solved: - Efficient control of gas flow in vacuum chambers - Precise opening and closing of chamber openings
Benefits: - Improved process control - Enhanced equipment performance - Increased productivity in vacuum-based processes
Commercial Applications: Title: "Advanced Gate Valve Technology for Vacuum Processing Equipment" This technology can be utilized in industries such as semiconductor manufacturing, aerospace, and research institutions for precise control of gas flow in vacuum chambers.
Questions about the technology: 1. How does the switching valve control the flow of gas to the drive? 2. What are the advantages of using gas pressure to move the valve element in a vacuum processing apparatus?
Original Abstract Submitted
A gate valve opens and closes a first opening of a first chamber in a vacuum processing apparatus. The gate valve includes a valve element configured to open and close the first opening; a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening, a first gas line and a second gas line; and a first switching valve that connects one of the first gas line and the second gas line to the drive. The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the closing position by pressure of gas supplied from the second gas line.
