18651776. WAFER TRANSPORT CONTAINER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
Contents
WAFER TRANSPORT CONTAINER
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Jyh-Shiou Hsu of Hsin-Chu (TW)
Jeng-Shin Ma of Taipei City (TW)
Cheng-Lung Wu of Zhunan Township (TW)
WAFER TRANSPORT CONTAINER - A simplified explanation of the abstract
This abstract first appeared for US patent application 18651776 titled 'WAFER TRANSPORT CONTAINER
Simplified Explanation: The wafer transport carrier described in the patent application includes components to improve air sealing and prevent contamination from entering the carrier.
Key Features and Innovation:
- Housing with a vacuum or inert gas to minimize humidity and oxygen ingress.
- Integrated wafer rack to prevent air leakage around the rack.
- Enhanced magnet-based door latch for air sealing around the housing opening.
Potential Applications: This technology can be used in semiconductor fabrication facilities to transport wafers without contamination, reducing defects and failures in devices.
Problems Solved: The technology addresses the issues of air leakage, humidity, oxygen ingress, and contamination entering the wafer transport carrier, which can lead to wafer defects and device failures.
Benefits:
- Improved air sealing to prevent contamination.
- Reduced risk of wafer defects and device failures.
- Enhanced reliability in semiconductor manufacturing processes.
Commercial Applications: The technology can be applied in the semiconductor industry for wafer transportation, ensuring the quality and reliability of semiconductor devices.
Questions about Wafer Transport Carrier: 1. How does the integrated wafer rack help prevent air leakage in the carrier? 2. What are the benefits of using a vacuum or inert gas in the housing to minimize contamination?
Frequently Updated Research: Ongoing research in semiconductor manufacturing focuses on improving wafer handling and transportation processes to enhance overall efficiency and quality control.
Original Abstract Submitted
A wafer transport carrier includes various components to provide improved air sealing to reduce air leakage into the wafer transport carrier. The wafer transport carrier may include a housing having a hollow shell that contains a vacuum or an inert gas to minimize and/or prevent humidity and oxygen ingress into the wafer transport carrier, a wafer rack that is integrated into the shell of the housing to minimize and/or prevent air leakage around the wafer rack, and/or an enhanced magnet-based door latch to provide air sealing around the full perimeter of the opening of the housing. These components and/or additional components described herein may reduce and/or prevent debris, moisture, and/or other types of contamination from the semiconductor fabrication facility from entering the wafer transport carrier and causing wafer defects and/or device failures.
