18630178. SEMICONDUCTOR DEVICE HAVING TEST PATTERN (SAMSUNG ELECTRONICS CO., LTD.)
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SEMICONDUCTOR DEVICE HAVING TEST PATTERN
Organization Name
Inventor(s)
Seunghye Baek of Suwon-si (KR)
Jeonghyun Kim of Suwon-si (KR)
Youngsik Park of Suwon-si (KR)
SEMICONDUCTOR DEVICE HAVING TEST PATTERN
This abstract first appeared for US patent application 18630178 titled 'SEMICONDUCTOR DEVICE HAVING TEST PATTERN
Original Abstract Submitted
A semiconductor device includes a semiconductor substrate, a first test pattern disposed on the semiconductor substrate, and a second test pattern located adjacent to the first test pattern. The first test pattern includes an overlay pattern, and the second test pattern includes a test element group.