18616014. ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION simplified abstract (Applied Materials, Inc.)
Contents
ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION
Organization Name
Inventor(s)
Pengyu Han of San Jose CA (US)
ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION - A simplified explanation of the abstract
This abstract first appeared for US patent application 18616014 titled 'ENDPOINT DETECTION SYSTEM FOR ENHANCED SPECTRAL DATA COLLECTION
Simplified Explanation: The patent application describes an endpoint detection system that uses optical technology to collect spectral data from a substrate surface.
- An optical bundle is connected to a light source.
- The optical bundle consists of emitting and receiving optical fibers at a specific angle.
- A collimator assembly receives light from the emitting fiber and directs spectral components to the substrate surface.
- Reflected spectral components are collected by the collimator and transmitted to the receiving fiber.
- The receiving fiber then sends the reflected spectral components to a light detection component for analysis.
Key Features and Innovation:
- Utilizes optical technology for enhanced spectral data collection.
- Optical bundle with emitting and receiving fibers at a pairing angle.
- Collimator assembly directs and collects spectral components from the substrate surface.
- Analysis of reflectance of the substrate surface based on collected spectral components.
Potential Applications:
- Quality control in manufacturing processes.
- Surface inspection in material science.
- Environmental monitoring for pollution detection.
Problems Solved:
- Efficient and accurate collection of spectral data.
- Non-invasive analysis of substrate surfaces.
- Enhanced endpoint detection capabilities.
Benefits:
- Improved accuracy in reflectance measurements.
- Real-time monitoring of substrate surfaces.
- Enhanced quality control processes.
Commercial Applications: Optical endpoint detection systems can be used in industries such as semiconductor manufacturing, pharmaceuticals, and environmental monitoring for precise analysis and quality control.
Prior Art: Readers interested in prior art related to optical endpoint detection systems can explore research papers, patents, and industry publications in the field of optical sensing technologies.
Frequently Updated Research: Stay updated on advancements in optical sensing technologies, spectral data analysis, and endpoint detection systems for potential improvements and innovations in the field.
Questions about Optical Endpoint Detection Systems: 1. How does the optical bundle improve spectral data collection compared to traditional methods? 2. What are the key factors to consider when implementing an optical endpoint detection system in different industries?
Original Abstract Submitted
An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source. The optical bundle includes an emitting optical fiber and a receiving optical fiber disposed at a pairing angle relative to the emitting optical fiber. The optical bundle is coupled to a collimator assembly that receives a light beam of incident light from the emitting optical fiber and directs spectral components of the light beam to first and second portions of a substrate surface. The collimator collects reflected spectral components produced by the spectral components directed to the substrate surface. The collimator assembly transmits the reflected spectral components to the receiving fiber, which transmits the reflected spectral components to a light detection component. A processing device coupled to the light detection component determines a reflectance of the substrate surface based on the reflected spectral components.
