18614804. INTEGRATED CIRCUIT DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

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INTEGRATED CIRCUIT DEVICE

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Woosuk Choi of Suwon-si (KR)

Beomjin Park of Suwon-si (KR)

Myunggil Kang of Suwon-si (KR)

Dongwon Kim of Suwon-si (KR)

Hyumin Yoo of Suwon-si (KR)

Soojin Jeong of Suwon-si (KR)

INTEGRATED CIRCUIT DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18614804 titled 'INTEGRATED CIRCUIT DEVICE

Simplified Explanation: The patent application describes an integrated circuit device with a unique structure involving a fin-type active region, nanosheets, gate lines, source/drain regions, and inner spacers.

  • The device has a fin-type active region that protrudes from a substrate and contains nanosheets separated from each other vertically.
  • A gate line surrounds the nanosheets and includes sub-gate portions between the nanosheets and a main gate portion above them.
  • Source/drain regions are connected to the nanosheets and located adjacent to the gate line.
  • Inner spacers are placed between the gate line and the source/drain regions, with different shapes for those facing the sub-gate portions and the main gate portion.

Key Features and Innovation:

  • Fin-type active region with nanosheets for enhanced performance.
  • Gate line design for precise control and operation.
  • Source/drain regions connected to nanosheets for efficient electron flow.
  • Unique inner spacer shapes for optimized functionality.

Potential Applications:

  • Advanced semiconductor devices.
  • High-performance computing systems.
  • Next-generation electronics.

Problems Solved:

  • Improved transistor performance.
  • Enhanced control over electron flow.
  • Increased efficiency in integrated circuits.

Benefits:

  • Higher processing speeds.
  • Lower power consumption.
  • Greater reliability in electronic devices.

Commercial Applications: The technology can be utilized in the development of cutting-edge smartphones, tablets, laptops, and other consumer electronics. It also has potential applications in the automotive industry for advanced driver assistance systems and autonomous vehicles.

Questions about the Technology: 1. How does the unique structure of the device contribute to its overall performance? 2. What are the specific advantages of using nanosheets in the fin-type active region?


Original Abstract Submitted

An integrated circuit device includes a fin-type active region that protrudes from a substrate and extends in a first horizontal direction, a plurality of nanosheets disposed on the fin-type active region and separated from each other in the vertical direction, a gate line that extends in a second horizontal direction and that surrounds the plurality of nanosheets on the fin-type active region, and includes respective sub-gate portions between the plurality of nanosheets and a main gate portion above the uppermost layer of the plurality of nanosheets, a source/drain region disposed on the fin-type active region, adjacent to the gate line, and connected to the plurality of nanosheets, and a plurality of inner spacers interposed between the gate line and the source/drain region. The shapes of first inner spacers that face the sub-gate portions differ from the shape of a second inner spacer that faces the main gate portion.