18609433. IMMERSION EXPOSURE TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
Contents
IMMERSION EXPOSURE TOOL
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Inventor(s)
Yung-Yao Lee of Zhubei City (TW)
IMMERSION EXPOSURE TOOL - A simplified explanation of the abstract
This abstract first appeared for US patent application 18609433 titled 'IMMERSION EXPOSURE TOOL
Simplified Explanation: The patent application describes a bottom lens for an immersion exposure tool with a hydrophobic coating on the sidewalls to improve thermal stability and reduce overlay variation during operation.
Key Features and Innovation:
- Hydrophobic coating on sidewalls of bottom lens
- Uncoated bottom portion for optical performance maintenance
- Reduction of thermal instability
- Decreased overlay variation
- Increased manufacturing yield and decreased device failures
Potential Applications: The technology can be applied in semiconductor manufacturing processes where immersion exposure tools are used.
Problems Solved: The technology addresses issues related to thermal instability and overlay variation in immersion exposure tools, which can impact manufacturing yield and device failures.
Benefits:
- Improved thermal stability
- Reduced overlay variation
- Increased manufacturing yield
- Decreased device failures
Commercial Applications: The technology can be utilized in the semiconductor industry for improving the performance and efficiency of immersion exposure tools, leading to higher manufacturing yields and reduced rework.
Questions about the Technology: 1. How does the hydrophobic coating on the sidewalls of the bottom lens improve the performance of the immersion exposure tool? 2. What specific benefits does the reduction of thermal instability bring to the manufacturing process?
Original Abstract Submitted
A bottom lens for an immersion exposure tool includes a hydrophobic coating on the sidewalls of the bottom lens. A bottom portion of the bottom lens is not coated with the hydrophobic coating to maintain the optical performance of the bottom lens and to not distort a pattern that is to be transferred to a substrate. The hydrophobic coating may reduce the thermal instability of the bottom lens. This may reduce overlay variation during operation of the immersion exposure tool, which may increase manufacturing yield, decrease device failures, and/or decrease rework and repairs.
