18609379. RUNOUT AND WOBBLE MEASUREMENT FIXTURES simplified abstract (ASM IP Holding B.V.)
Contents
- 1 RUNOUT AND WOBBLE MEASUREMENT FIXTURES
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 RUNOUT AND WOBBLE MEASUREMENT FIXTURES - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Key Features and Innovation
- 1.6 Potential Applications
- 1.7 Problems Solved
- 1.8 Benefits
- 1.9 Commercial Applications
- 1.10 Questions about the Technology
- 1.11 Original Abstract Submitted
RUNOUT AND WOBBLE MEASUREMENT FIXTURES
Organization Name
Inventor(s)
Aniket Nitin Patil of Tempe AZ (US)
Saket Rathi of Santa Clara CA (US)
Shiva K.T. Rajavelu Muralidhar of San Diego CA (US)
RUNOUT AND WOBBLE MEASUREMENT FIXTURES - A simplified explanation of the abstract
This abstract first appeared for US patent application 18609379 titled 'RUNOUT AND WOBBLE MEASUREMENT FIXTURES
Simplified Explanation
The patent application describes a fixture for determining runout and wobble of a susceptor assembly used in semiconductor processing systems.
- The fixture includes a base, a turntable, a first sensor for runout measurement, and a second sensor for wobble measurement.
- The turntable supports the susceptor assembly and can rotate around a central axis.
- The first sensor measures runout of the susceptor assembly, while the second sensor measures wobble.
- This technology aims to accurately assess the performance of susceptor assemblies in semiconductor processing.
Key Features and Innovation
- Fixture for determining runout and wobble of susceptor assemblies.
- Utilizes sensors to measure runout and wobble accurately.
- Helps in assessing the performance of susceptor assemblies in semiconductor processing systems.
Potential Applications
This technology can be used in semiconductor manufacturing facilities to ensure the quality and performance of susceptor assemblies.
Problems Solved
- Accurate measurement of runout and wobble in susceptor assemblies.
- Ensuring the reliability and efficiency of semiconductor processing systems.
Benefits
- Improved quality control in semiconductor manufacturing.
- Enhanced performance of susceptor assemblies.
- Increased efficiency in semiconductor processing.
Commercial Applications
- Title: "Advanced Fixture for Semiconductor Susceptor Assembly Evaluation"
- This technology can be utilized by semiconductor manufacturers to enhance the quality and performance of their products.
- It can also be used by semiconductor equipment suppliers to provide advanced testing solutions to their clients.
Questions about the Technology
How does the fixture accurately measure runout and wobble in susceptor assemblies?
The fixture includes sensors that are strategically positioned to detect any deviations in the rotation of the susceptor assembly, allowing for precise measurement of runout and wobble.
What are the potential implications of using this technology in semiconductor manufacturing?
By using this technology, semiconductor manufacturers can ensure the reliability and efficiency of their processing systems, leading to improved product quality and performance.
Original Abstract Submitted
A fixture is provided. The fixture includes a base, a turntable, a first sensor, and a second sensor. The turntable is supported on the base, is rotatable about a rotation axis, and is configured to slidably seat a susceptor assembly for rotation about the rotation axis. The first sensor is fixed relative to the base, is radially offset from the rotation axis, and is configured to determine ex-situ runout of the susceptor assembly. The second sensor is fixed relative to the first sensor, is axially offset from the first sensor, and is configured to determine ex-situ wobble of the susceptor assembly. Fixture arrangements and methods of determining ex-situ runout and ex-situ wobble of susceptor assemblies for semiconductor processing systems are also described.
