18599597. ON-CHIP CAPACITORS IN SEMICONDUCTOR DEVICES AND METHODS FOR FORMING THE SAME simplified abstract (Yangtze Memory Technologies Co., Ltd.)

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ON-CHIP CAPACITORS IN SEMICONDUCTOR DEVICES AND METHODS FOR FORMING THE SAME

Organization Name

Yangtze Memory Technologies Co., Ltd.

Inventor(s)

Lei Xue of Wuhan (CN)

Wei Liu of Wuhan (CN)

Liang Chen of Wuhan (CN)

ON-CHIP CAPACITORS IN SEMICONDUCTOR DEVICES AND METHODS FOR FORMING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18599597 titled 'ON-CHIP CAPACITORS IN SEMICONDUCTOR DEVICES AND METHODS FOR FORMING THE SAME

The abstract describes a method for forming a three-dimensional memory device, involving the creation of a stack with different regions and the formation of capacitors with specific orientations.

  • A stack is formed with a first region and a second region along different directions.
  • The stack includes first and second stacks in each region.
  • An interlayer dielectric (ILD) layer is formed over the second stack.
  • Capacitors with first contacts are created through the ILD layer on one side of the second stack in a perpendicular direction.

Potential Applications: - This technology can be applied in the development of advanced memory devices for various electronic devices. - It can enhance the storage capacity and performance of memory systems in computers, smartphones, and other gadgets.

Problems Solved: - Addresses the need for higher memory density and improved performance in modern electronic devices. - Solves challenges related to the design and fabrication of three-dimensional memory structures.

Benefits: - Increased memory capacity and speed. - Enhanced efficiency and reliability of memory devices. - Potential cost savings in memory production processes.

Commercial Applications: - This innovation has significant commercial potential in the semiconductor industry. - It can be utilized by memory manufacturers to produce next-generation memory devices with improved capabilities.

Questions about the technology: 1. How does the formation of capacitors with specific orientations contribute to the performance of the memory device? 2. What are the key advantages of using a stack with different regions in the fabrication process?


Original Abstract Submitted

A method for forming a three-dimensional (D) memory device is disclosed. A stack is formed. The stack includes a first region and a second region disposed on a side of the first region along a first direction. The stack includes a first stack in the first region and a second stack in the second region. An interlayer dielectric (ILD) layer is formed over the second stack. Capacitors including first contacts each extending through the ILD layer and disposed on a first side of the second stack along a second direction are formed. The second direction is perpendicular to the first direction.