18597077. CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM simplified abstract (Applied Materials, Inc.)

CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM

Organization Name

Applied Materials, Inc.

Inventor(s)

Roy C. Nangoy of Santa Clara CA (US)

Shantanu Rajiv Gadgil of Santa Clara CA (US)

Nathan Arron Davis of Gilbert AZ (US)

Allen L. D`ambra of Burlingame CA (US)

Michael J. Coughlin of Livermore CA (US)

Sumit Subhash Patankar of Fremont CA (US)

CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM - A simplified explanation of the abstract

This abstract first appeared for US patent application 18597077 titled 'CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM

The patent application describes a cleaning tool for a polishing liquid delivery arm in a chemical mechanical polishing system.

• The tool includes a body that attaches to the polishing liquid delivery arm and an insert that directs cleaning fluid back into the arm's enclosure.
• The insert's arm-facing surface is designed to efficiently clean the inner surface of the arm's enclosure.
• This tool helps maintain the cleanliness and functionality of the polishing liquid delivery arm, ensuring optimal performance of the polishing system.
• By effectively cleaning the arm, the tool can prevent clogs and blockages that may disrupt the polishing process.
• The design of the tool allows for easy removal and replacement, making maintenance of the polishing system more convenient and efficient.

Potential Applications: - Semiconductor manufacturing - Electronics industry - Research and development facilities

Problems Solved: - Ensures proper cleaning and maintenance of polishing liquid delivery arms - Prevents clogs and blockages in the arm's enclosure - Improves the overall performance and longevity of chemical mechanical polishing systems

Benefits: - Enhanced efficiency and reliability of polishing systems - Reduced downtime for maintenance and cleaning - Cost savings by preventing damage and disruptions in the polishing process

Commercial Applications: "Cleaning Tool for Polishing Liquid Delivery Arm in Chemical Mechanical Polishing Systems: Market Implications and Potential Commercial Uses"

Questions about the technology: 1. How does the cleaning tool improve the performance of chemical mechanical polishing systems? 2. What are the key features of the insert that make it effective in directing cleaning fluid back into the arm's enclosure?

Original Abstract Submitted

A polishing liquid delivery arm cleaning tool includes a body configured to be removably secured to a polishing liquid delivery arm of a chemical mechanical polishing system, and an insert removably secured to the body. The insert has an arm-facing surface shaped to direct a cleaning fluid from the polishing liquid delivery arm back to an inner surface of an enclosure of the polishing liquid delivery arm.