18592124. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (KIOXIA CORPORATION)

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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Organization Name

KIOXIA CORPORATION

Inventor(s)

Miki Toshima of Nagoya (JP)

Sadatoshi Murakami of Yokkaichi (JP)

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18592124 titled 'METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

The method described in the patent involves manufacturing a semiconductor device by forming layers with varying refractive indices on substrates, bonding the substrates together, irradiating the back surface with a laser beam, and peeling off the first substrate to leave the circuit layer on the second substrate.

  • Forming layers with different refractive indices on substrates
  • Bonding the substrates together
  • Irradiating the back surface with a laser beam
  • Peeling off the first substrate to leave the circuit layer on the second substrate

Potential Applications: - Semiconductor manufacturing - Optoelectronic devices - Photonic integrated circuits

Problems Solved: - Efficient manufacturing of semiconductor devices - Improved optical properties of the device

Benefits: - Enhanced performance of semiconductor devices - Cost-effective manufacturing process

Commercial Applications: - Production of high-performance semiconductor devices - Integration into various electronic systems

Questions about the technology: 1. How does the use of layers with different refractive indices improve the performance of semiconductor devices? 2. What are the potential challenges in implementing this manufacturing method on an industrial scale?

Frequently Updated Research: - Ongoing research on optimizing the laser irradiation process for improved device performance.


Original Abstract Submitted

A method of manufacturing a semiconductor device according to one embodiment includes: forming, on a first substrate, a first layer having a refractive index lower than a refractive index of the first substrate; forming, on the first layer, a second layer having a refractive index lower than a refractive index of the first layer; forming a first circuit layer on the second layer; bonding the first and second substrate after forming the first circuit layer; irradiating a back surface of the first substrate with a laser beam after bonding the first substrate and the second substrate; and peeling the first substrate so that the first circuit layer remains on a side of the second substrate after irradiating the back surface of the first substrate with the laser beam.