18588356. PROCESSING SYSTEM AND TRANSFER METHOD simplified abstract (Tokyo Electron Limited)
Contents
PROCESSING SYSTEM AND TRANSFER METHOD
Organization Name
Inventor(s)
Norihiko Amikura of Miyagi (JP)
PROCESSING SYSTEM AND TRANSFER METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18588356 titled 'PROCESSING SYSTEM AND TRANSFER METHOD
The patent application describes a processing system that includes a chamber for a consumable member, a storage module, a position detection sensor, a vacuum transfer module with a transfer robot, and a controller.
- The system controls the transfer of consumable members between the chamber and the storage module.
- It detects the position of the consumable member in the storage module using the position detection sensor.
- The system transfers a new consumable member from the storage module to the chamber based on the position of the previously transferred consumable member.
Potential Applications: - This technology can be used in manufacturing processes that require the precise transfer of consumable members. - It can be applied in industries such as semiconductor manufacturing, pharmaceutical production, and 3D printing.
Problems Solved: - Ensures accurate and efficient transfer of consumable members. - Reduces the risk of errors in the positioning of consumable members during the transfer process.
Benefits: - Increases productivity by automating the transfer process. - Enhances the precision and reliability of consumable member positioning. - Reduces the likelihood of damage to consumable members during transfer.
Commercial Applications: Title: Automated Consumable Member Transfer System for Manufacturing Processes This technology can be commercially used in industries where precise and automated transfer of consumable members is essential for production efficiency and quality control.
Questions about the technology: 1. How does the system ensure the accurate positioning of consumable members during transfer? 2. What are the potential cost-saving benefits of implementing this automated transfer system in manufacturing processes?
Original Abstract Submitted
A processing system includes: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module; and a controller. The controller performs processes of: (a) controlling transfer robot to transfer consumable member installed in the chamber to the storage module; (b) detecting position of the consumable member transferred to the storage module by the position detection sensor; and (c) controlling transfer robot to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).
