18581722. WAFER NOTCH POSITIONING DETECTION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
Contents
WAFER NOTCH POSITIONING DETECTION
Organization Name
Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor(s)
Kuang-Wei Hsueh of Zhubei City (TW)
Shih-Huan Chen of Zhubei City (TW)
WAFER NOTCH POSITIONING DETECTION - A simplified explanation of the abstract
This abstract first appeared for US patent application 18581722 titled 'WAFER NOTCH POSITIONING DETECTION
The patent application describes an optical system that utilizes a light source, reflector, light gate, light sensor, and processing device to determine the position of a notch on a wafer.
- The optical system includes a light source to provide a beam of light.
- A reflector is used to receive and redirect the beam of light.
- A light gate with an opening allows the beam of light to pass through.
- A light sensor receives a portion of the beam of light and converts it to a signal.
- A processing device analyzes the signal to determine the position of a notch on a wafer.
Potential Applications: - Semiconductor manufacturing - Quality control in wafer production - Automated inspection systems
Problems Solved: - Accurate positioning of notches on wafers - Efficient quality control processes - Automation of inspection tasks
Benefits: - Improved precision in wafer manufacturing - Increased efficiency in production processes - Reduction in human error
Commercial Applications: Title: "Advanced Optical System for Wafer Inspection in Semiconductor Manufacturing" This technology can be used in semiconductor fabrication facilities to enhance quality control processes and streamline production operations.
Questions about the technology: 1. How does the optical system improve the accuracy of notch positioning on wafers? 2. What are the key components of the processing device in the optical system?
Original Abstract Submitted
An optical system may include a light source to provide a beam of light. The optical system may include a reflector to receive and redirect the beam of light. The optical system may include a light gate having an opening to permit the beam of light, from the reflector, to travel through the opening. The optical system may include a light sensor to receive a portion of the beam of light after the beam of light travels through the opening, and convert the portion of the beam of light to a signal. The optical system may include a processing device to determine whether a notch of a wafer is in an allowable position based on the signal.
