18545448. EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD simplified abstract (EBARA CORPORATION)
Contents
EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD
Organization Name
Inventor(s)
Shinpei Tokunaga of Tokyo (JP)
EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18545448 titled 'EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD
The eddy current sensor described in the patent application consists of two detectors: a first detector that detects an eddy current generated in a semiconductor wafer and a second detector that detects the eddy current.
- The first detector includes a first exciting coil that generates the eddy current and a first detecting coil that detects the eddy current, both of which are air-core coils.
- The second detector includes a second exciting coil and a second detecting coil, which are coils with a magnetic core.
Potential Applications: - Quality control in semiconductor manufacturing - Non-destructive testing in material inspection - Industrial automation processes
Problems Solved: - Accurate detection of eddy currents in semiconductor wafers - Improved efficiency in quality control processes - Enhanced reliability in non-destructive testing
Benefits: - Increased precision in detecting eddy currents - Streamlined manufacturing processes - Cost-effective quality control solutions
Commercial Applications: Title: Advanced Eddy Current Sensor for Semiconductor Manufacturing This technology can be utilized in semiconductor fabrication facilities, material testing laboratories, and industrial automation companies to enhance quality control processes and improve overall efficiency.
Questions about Eddy Current Sensors: 1. How do eddy current sensors improve quality control in semiconductor manufacturing? Eddy current sensors provide accurate detection of defects in semiconductor wafers, ensuring high-quality products are produced consistently.
2. What are the advantages of using air-core coils in the first detector of the eddy current sensor? Air-core coils offer high sensitivity and precision in detecting eddy currents, making them ideal for semiconductor inspection applications.
Original Abstract Submitted
The eddy current sensor includes a first detector that detects an eddy current generated in a semiconductor wafer WH and a second detector that detects the eddy current. The first detector includes a first exciting coil configured to generate the eddy current and a first detecting coil configured to detect the eddy current. The first exciting coil and the first detecting coil are air-core coils. The second detector includes second exciting coil configured to generate the eddy current and second detecting coil configured to detect the eddy current. The second exciting coil and the second detecting coil are coils with a magnetic core.
