18542946. CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

NOZOMU Hayashi of Tochigi (JP)

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18542946 titled 'CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Simplified Explanation: The patent application describes a control apparatus for managing the position of a movable object. It includes a measurer to track the object's position, a feedback controller to adjust the position based on measurements, and a controller to oversee the measurer. The measurer uses an image sensor with pixels, adjusting the charge accumulation period to repeat measurements multiple times in a cycle and provide a statistical value to the feedback controller.

  • The apparatus controls the position of a movable object through feedback control in a predetermined cycle.
  • The measurer uses an image sensor with pixels to measure the object's position.
  • The controller adjusts the charge accumulation period of the pixels to repeat measurements multiple times in a cycle.
  • The feedback controller reduces the deviation of the measurement value from the target value.
  • The measurer provides a statistical value of multiple measurements to the feedback controller.

Potential Applications: 1. Robotics: This technology can be used in robotic systems to accurately control the position of robotic arms or other movable parts. 2. Automation: It can be applied in automated systems to ensure precise positioning of components or machinery. 3. Surveillance: The apparatus can be used in surveillance systems to track and control the position of cameras or sensors. 4. Medical Devices: This technology can be integrated into medical devices for precise positioning during surgeries or treatments.

Problems Solved: 1. Inaccurate positioning of movable objects. 2. Lack of real-time feedback control for position adjustments. 3. Difficulty in maintaining consistent measurements over time. 4. Limited control over the position of objects in automated systems.

Benefits: 1. Improved accuracy in controlling the position of movable objects. 2. Real-time feedback control for immediate adjustments. 3. Consistent and reliable measurements over time. 4. Enhanced control over the position of objects in automated systems.

Commercial Applications: Title: Precision Positioning Control Technology for Industrial Automation This technology can revolutionize industrial automation processes by providing precise control over the position of movable objects, leading to increased efficiency, productivity, and quality in manufacturing operations. It can be integrated into robotic systems, assembly lines, and other automated processes to optimize performance and reduce errors.

Questions about Precision Positioning Control Technology: 1. How does the feedback controller adjust the position of the movable object based on the measurement values obtained by the image sensor? 2. What are the potential challenges in implementing this technology in different industrial applications?


Original Abstract Submitted

A control apparatus for controlling a position of a movable object is provided. The apparatus includes a measurer configured to measure the position of the movable object, a feedback controller configured to perform feedback control of the position of the movable object in a predetermined cycle so as to reduce a deviation of a measurement value obtained by the measurer with respect to a target value, and a controller configured to control the measurer. The measurer includes an image sensor including a plurality of pixels, and the controller adjusts a charge accumulation period of the pixels so that the measurement is repeatedly performed N times (N is an integer not less than 2) in the predetermined cycle, and the measurer provides a statistic value of obtained N measurement values to the feedback controller.