18542665. SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD simplified abstract (SEMES CO., LTD.)
Contents
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Organization Name
Inventor(s)
Young Eun Jeon of Ulsan-si (KR)
Yun Sang Kim of Seongnam-si (KR)
Tae Hwan Lee of Cheonan-si (KR)
Jin Hee Hong of Hwaseong-si (KR)
Dong Young Jang of Seongnam-si (KR)
Young Jo Jin of Hwaseong-si (KR)
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18542665 titled 'SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Simplified Explanation: The patent application describes a substrate treatment system and method that allows for precise etching adjustments and increases the Unit Per Equipment Hour (UPEH) by reducing process time.
Key Features and Innovation:
- Technology for fine etching adjustment
- Increased UPEH by reducing process time
Potential Applications: The technology can be used in semiconductor manufacturing, electronics production, and other industries requiring precise substrate treatment.
Problems Solved: The technology addresses the need for fine etching adjustments and efficiency improvements in substrate treatment processes.
Benefits:
- Enhanced precision in etching adjustments
- Increased productivity with reduced process time
Commercial Applications: The technology can be applied in semiconductor fabrication facilities, electronics manufacturing plants, and research institutions to improve substrate treatment processes and increase overall efficiency.
Prior Art: Readers can explore prior patents related to substrate treatment systems and methods to understand the evolution of this technology.
Frequently Updated Research: Stay informed about the latest advancements in substrate treatment systems and methods to ensure the most up-to-date information on this technology.
Questions about Substrate Treatment Systems: 1. What are the key advantages of using a substrate treatment system? 2. How does the technology in this patent application improve substrate treatment processes?
Original Abstract Submitted
Proposed are a substrate treatment system and a substrate treatment method. More particularly, a technology capable of realizing a fine etching adjustment and capable of increasing a Unit Per Equipment Hour (UPEH) by reducing time required for a process is provided.
- SEMES CO., LTD.
- Young Eun Jeon of Ulsan-si (KR)
- Yun Sang Kim of Seongnam-si (KR)
- Min Sung Jeon of Osan-si (KR)
- Tae Hwan Lee of Cheonan-si (KR)
- Sung Min Choi of Osan-si (KR)
- Jin Hee Hong of Hwaseong-si (KR)
- Dong Young Jang of Seongnam-si (KR)
- Young Jo Jin of Hwaseong-si (KR)
- H01L21/67
- H01J37/32
- CPC H01L21/67276