18492587. INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

Naoki Miyata of Tochigi (JP)

Kenta Kita of Tochigi (JP)

INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18492587 titled 'INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

Simplified Explanation

The patent application describes an information processing apparatus that acquires and displays process data from different recipes on a display apparatus.

  • The apparatus includes a processor and memory for storing and executing instructions related to acquiring and displaying process data.
  • The processor acquires first process data from a substrate process in a first recipe and second process data from a substrate process in a different second recipe.
  • The acquired information is used to control a display on a display apparatus, showing a first screen with chronologically arranged first and second data groups.
  • The first data group displays the first process data, while the second data group displays the second process data in separate regions on the display.

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      1. Potential Applications
  • Quality control in manufacturing processes
  • Monitoring and comparing results from different process recipes
  • Data visualization for process analysis
      1. Problems Solved
  • Efficiently comparing results from different process recipes
  • Simplifying data analysis and decision-making processes
  • Enhancing visibility and understanding of process data
      1. Benefits
  • Improved process optimization
  • Enhanced decision-making based on comparative data
  • Streamlined data visualization for easier analysis and interpretation


Original Abstract Submitted

An information processing apparatus includes a processor and a memory for storing instructions to be executed by the processor, wherein the instructions stored in the memory are executed by the processor to acquire information containing first process data indicating a result of a substrate process in a first recipe and second process data indicating a result of a substrate process in a second recipe different from the first recipe, and control a display on a display apparatus based on the acquired information, and wherein control is performed to display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region.