18472531. HYPER-SPECTRAL MULTI-SPOT OPTICAL REFLECTOMETER (Applied Materials, Inc.)
HYPER-SPECTRAL MULTI-SPOT OPTICAL REFLECTOMETER
Organization Name
Inventor(s)
Pengyu Han of Santa Clara CA US
HYPER-SPECTRAL MULTI-SPOT OPTICAL REFLECTOMETER
This abstract first appeared for US patent application 18472531 titled 'HYPER-SPECTRAL MULTI-SPOT OPTICAL REFLECTOMETER
Original Abstract Submitted
An optical reflectometry system, including a processing chamber, a substrate support wherein the substrate support is configured to accept a substrate, a light source configured to transmit an incident light beam, an optical fiber bundle coupled to the light source and optically coupled to a lens assembly, wherein the lens assembly optically coupled to at least a first optical fiber, and configured to transmit to, and receive from, at least one area of the substrate through the transparent window, an optical splitter disposed within the optical fiber bundle; a return fiber bundle coupled to the optical splitter, and coupled to a detection system, wherein the detection system is configured to reference a reference light beam to a reflected light beam to improve a signal-to-noise ratio, analyze a full spectrum of the reflected light beam, and determine at least one characteristic of the at least one area of the substrate.