18468780. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)
Contents
- 1 SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
Organization Name
Inventor(s)
Yuri Takebayashi of Toyama-shi (JP)
Shinichiro Mori of Toyama-shi (JP)
Junichi Kawasaki of Toyama-shi (JP)
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM - A simplified explanation of the abstract
This abstract first appeared for US patent application 18468780 titled 'SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
Simplified Explanation
The patent application describes a technique for quickly identifying the cause of a failure in a substrate processing apparatus and supporting recovery.
- Memory storing recipes, apparatus information, and failure information
- Process vessel for processing substrates based on recipes
- Controller storing failure data in memory with occurrence time and apparatus-related information
- Controller adding second apparatus-related information to failure data after the failure
Potential Applications
This technology could be applied in various industries where substrate processing is involved, such as semiconductor manufacturing, solar panel production, and flat panel display manufacturing.
Problems Solved
This technology addresses the challenge of quickly identifying the cause of failures in substrate processing apparatus, which can help minimize downtime and improve overall efficiency in manufacturing processes.
Benefits
The benefits of this technology include faster recovery from failures, reduced downtime, improved troubleshooting capabilities, and enhanced overall productivity in substrate processing operations.
Potential Commercial Applications
Potential commercial applications of this technology include selling it to manufacturers of substrate processing equipment, offering it as a service to companies using such equipment, or integrating it into existing manufacturing systems for improved efficiency.
Possible Prior Art
One possible prior art could be fault detection and recovery systems in industrial automation, which aim to quickly identify and address issues in manufacturing processes to minimize downtime and improve productivity.
Unanswered Questions
How does this technique compare to traditional methods of failure identification in substrate processing apparatus?
This article does not provide a direct comparison between this technique and traditional methods of failure identification, leaving the reader to wonder about the specific advantages and limitations of this new approach.
What are the specific types of failures that this technique is most effective at identifying and recovering from?
The article does not specify the types of failures that this technique is best suited for, leaving the reader to question its applicability to different failure scenarios in substrate processing apparatus.
Original Abstract Submitted
According to the present disclosure, there is provided a technique capable of rapidly identifying a cause of an occurrence of a failure and supporting a recovery. There is provided a technique that includes: a memory storing recipes, apparatus information reported from within the substrate processing apparatus and failure information; a process vessel in which a substrate is processed based on a recipe; and a controller for: (i) storing failure data in the memory together with an occurrence time of the failure contained in the failure information when the failure occurs in the substrate processing apparatus, the failure data containing first apparatus-related information reported before the failure during a first period defined in advance and the recipe in the memory; and (ii) adding second apparatus-related information reported after the failure during a second period defined in advance to the failure data.
