18464348. THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

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THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Hyunsu Hwang of Suwon-si (KR)

Un-Byoung Kang of Suwon-si (KR)

Jumyong Park of Suwon-si (KR)

Dongjoon Oh of Suwon-si (KR)

Hyunchul Jung of Suwon-si (KR)

Sanghoo Cho of Suwon-si (KR)

THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18464348 titled 'THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

Simplified Explanation: The patent application describes a three-dimensional semiconductor memory device with a unique structure involving gate electrodes and interlayer insulating layers.

  • The bottom structure consists of a semiconductor substrate with a cell array region and a connection region, along with a stack of first gate electrodes and interlayer insulating layers.
  • The top structure includes a stack of second gate electrodes and interlayer insulating layers on top of the first stack.
  • The lengths of the gate electrodes vary based on their position in different directions relative to the semiconductor substrate.

Key Features and Innovation:

  • Three-dimensional semiconductor memory device design.
  • Alternating stack of gate electrodes and interlayer insulating layers.
  • Varying lengths of gate electrodes based on position.
  • Unique structure for improved memory performance.

Potential Applications:

  • Memory storage in electronic devices.
  • Data processing in computing systems.
  • High-speed data transfer applications.

Problems Solved:

  • Enhanced memory storage capacity.
  • Improved data processing speed.
  • Efficient use of semiconductor substrate space.

Benefits:

  • Higher memory density.
  • Faster data access.
  • Space-saving design.

Commercial Applications: The technology can be utilized in:

  • Smartphones and tablets.
  • Computers and servers.
  • Data centers and cloud computing facilities.

Questions about Three-Dimensional Semiconductor Memory Devices: 1. How does the unique structure of the memory device impact its performance? 2. What are the potential challenges in manufacturing such complex semiconductor devices?

Frequently Updated Research: Ongoing research focuses on:

  • Increasing memory capacity.
  • Enhancing data transfer speeds.
  • Optimizing the manufacturing process for cost-effectiveness.


Original Abstract Submitted

A three-dimensional semiconductor memory device may include a bottom structure and a top structure thereon. The bottom structure may include a semiconductor substrate including a cell array region and a connection region extending therefrom, and a first stack including first gate electrodes and first interlayer insulating layers alternately stacked on the semiconductor substrate. The top structure may include a second stack including second gate electrodes and second interlayer insulating layers alternately stacked on the first stack. Respective lengths of the first gate electrodes in a second direction may decrease as a distance in a first direction increases, and respective lengths of the second gate electrodes in the second direction may increase as a distance in the first direction increases. The first direction may be perpendicular to a bottom surface of the semiconductor substrate, and the second direction may be parallel to the bottom surface of the semiconductor substrate.