18463708. MEMS SENSOR AND MANUFACTURING METHOD THEREOF simplified abstract (ROHM CO., LTD.)
Contents
- 1 MEMS SENSOR AND MANUFACTURING METHOD THEREOF
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 MEMS SENSOR AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
MEMS SENSOR AND MANUFACTURING METHOD THEREOF
Organization Name
Inventor(s)
MEMS SENSOR AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 18463708 titled 'MEMS SENSOR AND MANUFACTURING METHOD THEREOF
Simplified Explanation
The present disclosure provides a MEMS sensor with a first substrate having a cavity and a second substrate bonded to the first substrate. The first substrate includes an electrode movably disposed in the cavity and a sealed member coupling to the second substrate. The second substrate includes a stop member for restricting the movement of the electrode toward the second substrate and a sealing member coupling to the sealed member. The sealed member is formed by a first metal layer on the first substrate, while the sealing member is formed by a second metal layer on the second substrate. A polycrystalline layer is formed on the stop member, which is disposed between the second substrate and the second metal layer.
- MEMS sensor with first and second substrates
- Electrode movably disposed in a cavity
- Sealed member and sealing member for coupling the substrates
- Stop member to restrict electrode movement
- Use of metal layers and polycrystalline layer for construction
Potential Applications
The technology can be applied in:
- Automotive industry for airbag deployment systems
- Aerospace industry for altitude and pressure sensors
- Consumer electronics for motion detection in smartphones
Problems Solved
- Improved accuracy and sensitivity in sensor measurements
- Enhanced durability and reliability in harsh environments
- Miniaturization of sensor components for compact devices
Benefits
- High precision in detecting and measuring various parameters
- Long-lasting performance with minimal maintenance required
- Versatile applications across different industries
Potential Commercial Applications
Optimizing the technology for:
- Medical devices for patient monitoring
- Industrial machinery for predictive maintenance
- Environmental monitoring for pollution control
Possible Prior Art
One possible prior art could be the use of similar MEMS sensor technology in existing pressure sensors for industrial applications.
What is the manufacturing process for creating the polycrystalline layer on the stop member?
The manufacturing process involves depositing a thin film of polycrystalline material on the stop member using techniques such as chemical vapor deposition or physical vapor deposition.
How does the sealing member improve the overall performance of the MEMS sensor?
The sealing member helps to maintain a hermetic seal between the first and second substrates, preventing any external contaminants from affecting the sensor's operation and ensuring long-term stability and reliability.
Original Abstract Submitted
The present disclosure provides a MEMS sensor. The MEMS sensor includes a first substrate having a cavity and a second substrate bonded to the first substrate. The first substrate is provided with an electrode movably disposed in the cavity and a sealed member coupling to the second substrate. The second substrate is provided with a stop member for restricting a movement of the electrode toward the second substrate and a sealing member coupling to the sealed member. The sealed member is formed by a first metal layer on the first substrate. The sealing member is formed by a second metal layer on the second substrate. A polycrystalline layer is formed on the stop member. The polycrystalline layer is disposed between the second substrate and the second metal layer.
