18439434. METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL STACKING STRUCTURE simplified abstract (Applied Materials, Inc.)

METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL STACKING STRUCTURE

Organization Name

Applied Materials, Inc.

Inventor(s)

Michael Yu-tak Young of Cupertino CA (US)

Ludovic Godet of Sunnyvale CA (US)

Robert Jan Visser of Menlo Park CA (US)

Naamah Argaman of San Jose CA (US)

Christopher Dennis Bencher of Santa Clara CA (US)

Wayne Mcmillan of San Jose CA (US)

METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL STACKING STRUCTURE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18439434 titled 'METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL STACKING STRUCTURE

Simplified Explanation

This patent application describes a method for creating a sub-micron 3D diffractive optics element on a film stack without planarization.

• Hardmask is formed on the film stack.
• Mask material is applied on the hardmask and top surface.
• Etching and trimming processes are carried out multiple times.
• The mask material is stripped after the final etching process.

Key Features and Innovation

• Formation of sub-micron 3D diffractive optics element without planarization.
• Use of hardmask and mask material for precise etching.
• Multiple etching and trimming steps for intricate design creation.

Potential Applications

The technology can be used in:

• Microscopy
• Telecommunications
• Optical computing

Problems Solved

• Difficulty in creating sub-micron 3D diffractive optics elements.
• Achieving precise and intricate designs without planarization.

Benefits

• Enhanced optical performance.
• Miniaturization of optical components.
• Improved efficiency in optical systems.

Commercial Applications

The technology can be applied in industries such as:

• Semiconductor manufacturing
• Aerospace
• Medical devices

Prior Art

Readers can explore prior research on sub-micron optics fabrication techniques and diffractive optics elements.

Frequently Updated Research

Stay updated on advancements in sub-micron optics fabrication and diffractive optics technology for potential improvements in design and manufacturing processes.

Questions about Sub-micron 3D Diffractive Optics Element

What are the key advantages of using a sub-micron 3D diffractive optics element?

A sub-micron 3D diffractive optics element offers enhanced optical performance, miniaturization of optical components, and improved efficiency in optical systems.

How does the method described in the patent application differ from traditional optics fabrication techniques?

The method described in the patent application allows for the creation of sub-micron 3D diffractive optics elements without the need for planarization, using a combination of hardmask and mask material for precise etching processes.

Original Abstract Submitted

Embodiments herein describe a sub-micron 3D diffractive optics element and a method for forming the sub-micron 3D diffractive optics element. In a first embodiment, a method is provided for forming a sub-micron 3D diffractive optics element on a film stack disposed on a substrate without planarization. The method includes forming a hardmask on a top surface of a film stack. Forming a mask material on a portion of the top surface and a portion of the hardmask. Etching the top surface. Trimming the mask. Etching the top surface again. Trimming the mask a second time. Etching the top surface yet again and then stripping the mask material.