18435175. CALIBRATION JIG AND CALIBRATION METHOD simplified abstract (Applied Materials, Inc.)
Contents
- 1 CALIBRATION JIG AND CALIBRATION METHOD
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 CALIBRATION JIG AND CALIBRATION METHOD - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
CALIBRATION JIG AND CALIBRATION METHOD
Organization Name
Inventor(s)
Andrew Myles of Sunnyvale CA (US)
Denis Martin Koosau of Sunnyvale CA (US)
Peter Muraoka of Santa Clara CA (US)
Phillip Criminale of Livermore CA (US)
CALIBRATION JIG AND CALIBRATION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18435175 titled 'CALIBRATION JIG AND CALIBRATION METHOD
Simplified Explanation
The abstract describes apparatus and methods for calibrating a height-adjustable edge ring using a calibration jig with sensors and contact pads on a transparent plate.
- The calibration jig includes a transparent plate, sensors on one side, and contact pads on the other side.
- The sensors are used to position the edge ring relative to a reference surface.
- The contact pads help ensure accurate calibration of the height-adjustable edge ring.
Potential Applications
This technology could be used in industries that require precise calibration of equipment, such as semiconductor manufacturing or precision engineering.
Problems Solved
This technology solves the problem of accurately calibrating a height-adjustable edge ring, which is crucial for maintaining the quality and precision of processes in industries like semiconductor manufacturing.
Benefits
The benefits of this technology include improved accuracy in calibration, which can lead to higher quality products and more efficient manufacturing processes.
Potential Commercial Applications
A potential commercial application for this technology could be in the semiconductor manufacturing industry, where precise calibration is essential for producing high-quality semiconductor products.
Possible Prior Art
One possible prior art for this technology could be existing calibration jigs or methods used in industries that require precise calibration of equipment.
Unanswered Questions
How does this technology compare to existing calibration methods in terms of accuracy and efficiency?
This article does not provide a direct comparison between this technology and existing calibration methods.
What are the potential cost implications of implementing this technology in a manufacturing setting?
The article does not address the potential cost implications of implementing this technology in a manufacturing setting.
Original Abstract Submitted
Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.
