18431579. LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION simplified abstract (Applied Materials, Inc.)

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LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION

Organization Name

Applied Materials, Inc.

Inventor(s)

David T. Blahnik of Round Rock TX (US)

Charles T. Carlson of Cedar Park TX (US)

Robert B. Vopat of Austin TX (US)

Frank Sinclair of Boston MA (US)

Paul J. Murphy of Reading MA (US)

Krag R. Senior of Austin TX (US)

LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION - A simplified explanation of the abstract

This abstract first appeared for US patent application 18431579 titled 'LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION

Simplified Explanation

The abstract describes a linear accelerator assembly for an ion implanter, which includes a coil resonator and drift tubes coupled to the coil resonator by flexible leads.

  • Linear accelerator assembly for an ion implanter
  • Includes a coil resonator and drift tubes
  • Drift tubes are coupled to the coil resonator by flexible leads

Potential Applications

The technology could be used in the semiconductor industry for ion implantation processes.

Problems Solved

This technology solves the problem of efficiently accelerating ions for implantation processes.

Benefits

The benefits of this technology include improved ion implantation efficiency and accuracy.

Potential Commercial Applications

The linear accelerator assembly could be used in semiconductor manufacturing facilities for ion implantation processes.

Possible Prior Art

One possible prior art could be existing linear accelerator assemblies used in the field of particle physics research.

Unanswered Questions

How does this technology compare to traditional ion implantation methods?

The article does not provide a direct comparison between this technology and traditional ion implantation methods.

Are there any limitations to the use of this linear accelerator assembly?

The article does not address any potential limitations or drawbacks of using this technology.


Original Abstract Submitted

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.