18430924. MEMS DEVICE simplified abstract (Murata Manufacturing Co., Ltd.)
Contents
MEMS DEVICE
Organization Name
Murata Manufacturing Co., Ltd.
Inventor(s)
Masakazu Fukumitsu of Nagaokakyo-shi (JP)
Anssi Blomqvist of Nagaokakyo-shi (JP)
Altti Torkkeli of Nagaokakyo-shi (JP)
Ville Kaajakari of Nagaokakyo-shi (JP)
MEMS DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18430924 titled 'MEMS DEVICE
Simplified Explanation
The patent application describes an inertial sensor with a MEMS substrate and an upper lid joined to the substrate. The MEMS substrate includes movable electrodes that change capacitance based on their distance, held in place by a holding portion and connected by a spring portion.
- MEMS substrate with movable electrodes
- Capacitance portion for distance measurement
- Holding portion for stability
- Spring portion for flexibility
Potential Applications
This technology could be used in:
- Motion sensing devices
- Navigation systems
- Robotics
Problems Solved
This technology addresses issues related to:
- Accurate distance measurement
- Stability in motion sensing
- Precision in navigation systems
Benefits
The benefits of this technology include:
- Improved accuracy in measurements
- Enhanced stability in motion sensing
- Increased precision in navigation
Potential Commercial Applications
This technology could be commercially apply in:
- Consumer electronics
- Automotive industry
- Aerospace sector
Possible Prior Art
One possible prior art for this technology could be the use of similar MEMS substrates in other types of sensors for distance measurement.
Unanswered Questions
How does this technology compare to other inertial sensors on the market?
This article does not provide a direct comparison with other inertial sensors currently available.
What is the expected lifespan of this inertial sensor technology?
The article does not mention the expected lifespan of this technology or any durability testing that has been conducted.
Original Abstract Submitted
An inertial sensor includes a MEMS substrate and an upper lid joined to the MEMS substrate. The MEMS substrate includes a capacitance portion including first and second movable electrodes causing a capacitance to change in accordance with a distance between the first and second movable electrodes, a holding portion holding the capacitance portion, and a spring portion connecting the capacitance portion and the holding portion to each other and supporting the first movable electrode and the second movable electrode in a displaceable manner with respect to the holding portion.
