18419389. MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION simplified abstract (Applied Materials, Inc.)

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION

Organization Name

Applied Materials, Inc.

Inventor(s)

JAMES Carducci of Sunnyvale CA (US)

RICHARD C. Fovell of San Jose CA (US)

LARRY D. Elizaga of Tracy CA (US)

SILVERST Rodrigues of Bangalore (IN)

VLADIMIR Knyazik of Santa Clara CA (US)

PHILIP ALLAN Kraus of San Jose CA (US)

THAI CHENG Chua of Cupertino CA (US)

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION - A simplified explanation of the abstract

This abstract first appeared for US patent application 18419389 titled 'MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION

Simplified Explanation

The patent application describes a housing for a source array, with a conductive body having openings and a channel, covered by a cover with holes, and a second hole intersecting with the channel.

• The housing includes a conductive body with a first and second surface.
• Multiple openings are formed through the conductive body.
• A channel is present in the second surface of the conductive body.
• A cover with holes is placed over the channel.
• A second hole is included in the conductive body, intersecting with the channel.

Key Features and Innovation

• Housing for a source array with a conductive body.
• Openings and a channel for efficient functionality.
• Cover with holes for protection and access.
• Second hole for additional functionality.

Potential Applications

The technology can be used in electronic devices, sensors, and other equipment requiring a housing for source arrays.

Problems Solved

The housing provides a secure and functional enclosure for source arrays, protecting them while allowing for necessary access and connections.

Benefits

• Enhanced protection for source arrays.
• Efficient design for optimal functionality.
• Easy access for maintenance and connections.

Commercial Applications

• Electronics manufacturing for devices.
• Sensor technology for various industries.
• Research and development for advanced equipment.

Prior Art

Readers can explore prior patents related to housing designs for source arrays to understand the evolution of this technology.

Frequently Updated Research

Stay informed about advancements in housing technology for source arrays to ensure the latest innovations are incorporated into future designs.

Questions about Housing for Source Arrays

What are the key components of the housing for a source array?

The key components include a conductive body, openings, a channel, a cover with holes, and a second hole for functionality.

How does the housing design benefit the functionality of source arrays?

The housing design provides protection, access, and efficient connections for source arrays, enhancing their overall performance.

Original Abstract Submitted

Embodiments disclosed herein include a housing for a source array. In an embodiment, the housing comprises a conductive body, where the conductive body comprises a first surface and a second surface opposite from the first surface. In an embodiment a plurality of openings are formed through the conductive body and a channel is disposed into the second surface of the conductive body. In an embodiment, a cover is over the channel, and the cover comprises first holes that pass through a thickness of the cover. In an embodiment, the housing further comprises a second hole through a thickness of the conductive body. In an embodiment, the second hole intersects with the channel.