18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
Contents
CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
Organization Name
Inventor(s)
OSAMU Yasunobe of Tochigi (JP)
CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18402094 titled 'CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
The conveyance apparatus described in the patent application is designed to move a substrate using a movable base, a holding unit, a cover plate, and a driver.
- The apparatus includes a movable base that serves as the foundation for the conveying mechanism.
- A holding unit is attached to the base and is responsible for holding the substrate securely during transport.
- A cover plate is also attached to the base to provide protection for the substrate.
- The driver is the component that drives the base and the holding unit, ensuring smooth and controlled movement.
- The driver is capable of driving the holding unit between different spaces to avoid interference with the substrate chuck.
Potential Applications: - Semiconductor manufacturing - Printed circuit board production - Flat panel display manufacturing
Problems Solved: - Ensures safe and efficient transportation of delicate substrates - Minimizes the risk of damage during handling
Benefits: - Increased productivity in manufacturing processes - Reduced downtime due to substrate mishandling - Improved quality control
Commercial Applications: Title: Advanced Substrate Conveyance System for High-Tech Manufacturing This technology could be utilized in industries such as semiconductor manufacturing, electronics production, and display manufacturing, where precise handling of substrates is crucial for product quality.
Questions about the technology: 1. How does this conveyance apparatus improve substrate handling efficiency in manufacturing processes? 2. What are the key features that set this apparatus apart from traditional substrate conveyance systems?
Original Abstract Submitted
A conveyance apparatus for conveying a substrate is provided. The apparatus includes a movable base, a holding unit attached to the base and configured to hold the substrate and be movable with respect to the base, a cover plate attached to the base, and a driver configured to drive the base and the holding unit. The driver is configured to, in a state in which the cover plate covers a surface of the substrate held by a substrate chuck, drive the holding unit between a first space on a side of a substrate chuck where interference with the substrate chuck does not occur and a second space between a chuck surface of the substrate chuck and the substrate raised from the chuck surface.
