18395801. REMOTE SOLID REFILL CHAMBER simplified abstract (ASM IP Holding B.V.)

REMOTE SOLID REFILL CHAMBER

Organization Name

ASM IP Holding B.V.

Inventor(s)

Eric James Shero of Phoenix AZ (US)

Jonathan Bakke of Phoenix AZ (US)

Arjav Prafulkumar Vashi of Tempe AZ (US)

Todd Robert Dunn of Cave Creek AZ (US)

Paul Ma of Scottsdale AZ (US)

Jacqueline Wrench of Mesa AZ (US)

Jereld Lee Winkler of Gilbert AZ (US)

Shuaidi Zhang of Chandler AZ (US)

Shubham Garg of Tempe AZ (US)

YoungChol Byun of Tempe AZ (US)

REMOTE SOLID REFILL CHAMBER - A simplified explanation of the abstract

This abstract first appeared for US patent application 18395801 titled 'REMOTE SOLID REFILL CHAMBER

The substrate processing system described in the patent application involves a delivery vessel, a remote refill vessel, and a heating or pressurizing device to change the phase of a chemical.

• The system includes a delivery vessel with a first inner volume on a substrate processing platform.
• A remote refill vessel with a larger second inner volume is in fluid communication with the delivery vessel via a chemical delivery line.
• The remote refill vessel is located in a second location remote from the substrate processing platform.
• A heating device or pressurizing device near the remote refill vessel can change the phase of the chemical from a first phase to a second phase.

Potential Applications: - Semiconductor manufacturing - Chemical processing industries - Pharmaceutical production

Problems Solved: - Efficient delivery and phase change of chemicals in substrate processing - Remote refill capability for continuous operation

Benefits: - Increased productivity and efficiency in substrate processing - Reduced downtime for refilling chemicals - Enhanced safety measures with remote refill capability

Commercial Applications: Title: Advanced Chemical Delivery System for Substrate Processing This technology can be utilized in industries such as semiconductor manufacturing, chemical processing, and pharmaceutical production to streamline processes and improve overall efficiency.

Prior Art: Further research can be conducted in the field of chemical delivery systems for substrate processing to identify any existing technologies or patents related to this innovation.

Frequently Updated Research: Stay updated on advancements in chemical delivery systems, substrate processing technologies, and safety measures in chemical handling to enhance the efficiency and safety of substrate processing operations.

Questions about the Advanced Chemical Delivery System for Substrate Processing: 1. How does this technology improve the efficiency of substrate processing operations? 2. What are the potential safety benefits of using a remote refill vessel in this system?

Original Abstract Submitted

The substrate processing system includes a delivery vessel having a first inner volume, disposed in a first location on a substrate processing platform, a remote refill vessel in fluid communication with the delivery vessel via a chemical delivery line, the remote refill vessel comprising a second inner volume greater than the first inner volume and disposed in a second location remote from the substrate processing platform, and a first heating device or a first pressurizing device, or a combination thereof, proximate the remote refill vessel, operable to heat or pressurize, or a combination thereof, a chemical disposed in the remote refill vessel sufficient to change a phase of the chemical from a first phase to a second phase.