18394133. METHODS FOR INCREASING THE DENSITY OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS simplified abstract (Applied Materials, Inc.)

METHODS FOR INCREASING THE DENSITY OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS

Organization Name

Applied Materials, Inc.

Inventor(s)

Andrew Ceballos of Palo Alto CA (US)

Rami Hourani of Santa Clara CA (US)

Kenichi Ohno of Sunnyvale CA (US)

Yuriy Melnik of San Jose CA (US)

Amita Joshi of Fremont CA (US)

METHODS FOR INCREASING THE DENSITY OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18394133 titled 'METHODS FOR INCREASING THE DENSITY OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS

Simplified Explanation

Embodiments of the present disclosure relate to densified nanoimprint films containing a base nanoimprint film and a metal oxide, as well as optical devices incorporating these films. The base nanoimprint film consists of nanoparticles such as titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, hafnium oxide, chromium oxide, indium tin oxide, silicon nitride, or a combination thereof. The metal oxide includes aluminum oxide, titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, indium oxide, indium tin oxide, hafnium oxide, chromium oxide, scandium oxide, tin oxide, zinc oxide, yttrium oxide, praseodymium oxide, magnesium oxide, silicon oxide, silicon nitride, silicon oxynitride, or a combination thereof.

• Densified nanoimprint films consist of a base nanoimprint film and a metal oxide layer.
• The base nanoimprint film contains nanoparticles like titanium oxide, zirconium oxide, and more.
• The metal oxide layer includes aluminum oxide, titanium oxide, and other compounds.

Potential Applications

The technology of densified nanoimprint films can be applied in:

• Optical devices
• Nanotechnology research
• Semiconductor industry

Problems Solved

The densified nanoimprint films address the following issues:

• Improving optical device performance
• Enhancing durability and stability of nanostructures
• Facilitating nanoscale patterning processes

Benefits

The utilization of densified nanoimprint films offers several advantages, including:

• Increased optical clarity
• Enhanced mechanical strength
• Improved resistance to environmental factors

Potential Commercial Applications of Densified Nanoimprint Films

The technology of densified nanoimprint films has potential commercial applications in:

• Display technology
• Photovoltaic devices
• Biomedical imaging

Possible Prior Art

One possible prior art in this field is the use of traditional nanoimprint lithography techniques to create nanostructures on various substrates. These techniques may lack the densification process provided by the current innovation, leading to differences in optical and mechanical properties.

How does the densification process affect the overall performance of the nanoimprint films?

The article does not delve into the specific mechanisms by which densification enhances the properties of the nanoimprint films. Further research may be needed to understand the relationship between densification and film performance.

Are there any limitations to the types of nanoparticles that can be incorporated into the base nanoimprint film?

The article mentions several types of nanoparticles that can be used in the base nanoimprint film, but it does not discuss any potential restrictions or challenges associated with their integration. Investigating the compatibility of different nanoparticles with the film matrix could provide valuable insights for future developments in this area.

Original Abstract Submitted

Embodiments of the present disclosure generally relate to densified nanoimprint films and processes for making these densified nanoimprint films, as well as optical devices containing the densified nanoimprint films. In one or more embodiments, a densified nanoimprint film contains a base nanoimprint film and a metal oxide disposed on the base nanoimprint film and in between the nanoparticles. The base nanoimprint film contains nanoparticles, where the nanoparticles contain titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, hafnium oxide, chromium oxide, indium tin oxide, silicon nitride, or any combination thereof. The metal oxide contains aluminum oxide, titanium oxide, zirconium oxide, niobium oxide, tantalum oxide, indium oxide, indium tin oxide, hafnium oxide, chromium oxide, scandium oxide, tin oxide, zinc oxide, yttrium oxide, praseodymium oxide, magnesium oxide, silicon oxide, silicon nitride, silicon oxynitride, or any combination thereof.