18371230. SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD simplified abstract (Samsung Display Co., LTD.)
Contents
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD
Organization Name
Inventor(s)
Oh June Kwon of Yongin-si (KR)
Hyo Jeong Kwon of Yongin-si (KR)
Seung Yeon Chae of Yongin-si (KR)
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18371230 titled 'SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD
The abstract describes a substrate inspection apparatus that utilizes optical coherence tomography (OCT) to measure the optical and physical thickness of an organic layer on a substrate, and calculate the refractive index based on these measurements.
- Optical coherence tomography (OCT) measuring device used for substrate inspection.
- Measures optical thickness and physical thickness of an organic layer on the substrate.
- Calculates refractive index based on the measured thickness values.
- Processor sets a reference line and measures thickness from this line to the organic layer.
- Cross-sectional image generated by optical interference between light radiated onto the organic layer and reflected light.
Potential Applications: - Quality control in manufacturing processes. - Inspection of thin film coatings on substrates. - Research and development in materials science.
Problems Solved: - Accurate measurement of organic layer thickness. - Calculation of refractive index for optical properties.
Benefits: - Improved quality control. - Enhanced understanding of material properties. - Efficient substrate inspection process.
Commercial Applications: Title: Advanced Substrate Inspection Technology for Manufacturing Processes This technology can be used in industries such as semiconductor manufacturing, pharmaceuticals, and display production for quality control and research purposes.
Questions about Substrate Inspection Technology: 1. How does the use of optical coherence tomography improve substrate inspection accuracy?
- Optical coherence tomography provides high-resolution cross-sectional images for precise measurements.
2. What are the potential challenges in implementing this technology in industrial settings?
- Challenges may include calibration of the system for different substrates and integration into existing manufacturing processes.
Original Abstract Submitted
A substrate inspection apparatus includes an optical coherence tomography (OCT) measuring device which outputs a cross-sectional image generated by optical interference between light radiated onto an organic layer on a substrate and reflected light reflected from the organic layer, a memory which stores one or more instructions and a processor which executes the one or more instructions stored in the memory, where the processor sets a reference line extending from a line in contact with one surface of the substrate, on which the organic layer is not disposed, from the cross-sectional image, measures an optical thickness from a first upper line to a lower line of the organic layer in a first area in the cross-sectional image, measures a physical thickness from the first upper line of the organic layer to the reference line, and calculate a refractive index based on the optical thickness and the physical thickness.
