18367321. MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS (Applied Materials, Inc.)
Contents
MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
Organization Name
Inventor(s)
Shashank Sharma of Fremont CA (US)
Wolfgang Robert Aderhold of Cupertino CA (US)
Vikash Banthia of Los Altos CA (US)
MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
This abstract first appeared for US patent application 18367321 titled 'MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
Original Abstract Submitted
A system includes a chamber body defining a processing volume. The system further includes a substrate support pedestal positioned in the processing volume and operable to support a substrate, the substrate support pedestal including one or more channels, where a coolant medium flows through the one or more channels to facilitate heat transfer from the substrate to the coolant medium. The system further includes a coolant medium circulator to circulate the coolant medium through the one or more channels. The system further includes a substrate temperature sensor operatively coupled to the chamber body, where the substrate temperature sensor measures a temperature of the substrate. The system further includes a coolant medium circulation controller, coupled to the coolant medium circulator and the substrate temperature sensor, to control a rate at which the coolant medium is circulated through the one or more channels.
