18236115. SUSCEPTOR HEIGHT ADJUSTMENT (Applied Materials, Inc.)
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Contents
SUSCEPTOR HEIGHT ADJUSTMENT
Organization Name
Inventor(s)
Vijay D. Parkhe of San Jose CA (US)
SUSCEPTOR HEIGHT ADJUSTMENT
This abstract first appeared for US patent application 18236115 titled 'SUSCEPTOR HEIGHT ADJUSTMENT
Original Abstract Submitted
A susceptor includes a plurality of substrate support subsections. The susceptor further includes a vertical-movement component associated with a first substrate support subsection of the plurality of substrate support subsections. The vertical-movement component is configured to vertically move at least a portion of the first substrate support subsection.
