18223606. PRECURSOR SUPPLY SYSTEM simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
Contents
PRECURSOR SUPPLY SYSTEM
Organization Name
Inventor(s)
PRECURSOR SUPPLY SYSTEM - A simplified explanation of the abstract
This abstract first appeared for US patent application 18223606 titled 'PRECURSOR SUPPLY SYSTEM
Simplified Explanation
The patent application describes a precursor supply system that converts a solid-state precursor into vapor for use in a process chamber. Here is a simplified explanation of the abstract:
- The system includes a storage tank that stores the precursor in a solid state.
- A transfer pipe is connected to the storage tank to transfer the solid-state precursor.
- A phase converter is connected to the transfer pipe and sublimates the solid-state precursor into vapor.
- A supply pipe is connected to the phase converter and transports the precursor in a vaporous state.
- A process chamber is located adjacent to the phase converter and connected to the supply pipe.
Potential applications of this technology:
- Semiconductor manufacturing: The system can be used to supply precursor vapors for deposition processes in semiconductor fabrication.
- Chemical synthesis: It can be utilized in chemical synthesis processes that require precise control over precursor vapor delivery.
- Thin film deposition: The system can be employed in thin film deposition techniques, such as physical vapor deposition or chemical vapor deposition.
Problems solved by this technology:
- Precursor handling: The system eliminates the need for manual handling of solid-state precursors, reducing the risk of contamination and improving safety.
- Precursor sublimation: The phase converter efficiently converts the solid-state precursor into vapor, ensuring a consistent and controlled supply to the process chamber.
Benefits of this technology:
- Improved process control: The system allows for precise control over precursor vapor delivery, leading to better process reproducibility and quality.
- Enhanced safety: By eliminating manual handling of solid-state precursors, the system reduces the risk of accidents and exposure to hazardous materials.
- Increased efficiency: The phase converter efficiently converts the solid-state precursor into vapor, minimizing waste and optimizing resource utilization.
Original Abstract Submitted
A precursor supply system includes a storage tank storing the precursor in a solid state; a transfer pipe connected to the storage tank to transfer the precursor in a solid state; a phase converter connected to the transfer pipe and sublimating the transported solid-state precursor into vapor; a supply pipe connected to the phase converter and transporting a precursor in a vaporous state; and a process chamber disposed adjacently to the phase converter and connected to the supply pipe.
