18218485. DEPOSITION APPARATUS simplified abstract (Samsung Display Co., LTD.)
Contents
DEPOSITION APPARATUS
Organization Name
Inventor(s)
KYUNGHOON Chung of Yongin-si (KR)
DEPOSITION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 18218485 titled 'DEPOSITION APPARATUS
Simplified Explanation
The deposition apparatus described in the patent application includes a mask, a mask frame, a stage on the rear surface of the mask frame, and external force applying parts on the stage to control the shape of the mask frame.
- The apparatus consists of a mask, mask frame, stage, and external force applying parts.
- The external force applying parts apply force to the mask frame to control its shape.
- Each portion includes a support and a driving part to move the support.
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- Potential Applications
- Semiconductor manufacturing
- Thin film deposition processes
- Optical coating applications
- Problems Solved
- Precise control of mask frame shape
- Improved deposition accuracy
- Enhanced uniformity in thin film coatings
- Benefits
- Increased efficiency in manufacturing processes
- Higher quality thin film coatings
- Cost savings in production operations
Original Abstract Submitted
A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.
