18206861. REGENERATOR FOR FORELINE HEATING simplified abstract (Applied Materials, Inc.)
Contents
REGENERATOR FOR FORELINE HEATING
Organization Name
Inventor(s)
Santosh S. Nesarkar of Bangalore (IN)
Harinath Reghunathannair of Bengaluru (IN)
Sathishkumar Kummamoorthy of Bangalore (IN)
REGENERATOR FOR FORELINE HEATING - A simplified explanation of the abstract
This abstract first appeared for US patent application 18206861 titled 'REGENERATOR FOR FORELINE HEATING
Simplified Explanation: The patent application describes semiconductor processing systems that provide regenerative heating to a foreline component. This system includes a plasma-based processing chamber with fluid paths for circulating a heat transfer fluid, vacuum systems for exhausting process gases, and a foreline regenerator with a regenerator shell surrounding the foreline vent.
- The system includes a plasma-based processing chamber with fluid paths for circulating a heat transfer fluid.
- Vacuum systems are used to exhaust process gases from the processing chamber.
- A foreline regenerator with a regenerator shell surrounds the foreline vent.
- The regenerator shell includes a heat transfer fluid input and output.
- The heat transfer fluid input is connected to an output of the processing chamber.
Potential Applications: This technology can be applied in semiconductor manufacturing processes, specifically in plasma-based processing chambers where precise temperature control is required.
Problems Solved: This technology addresses the need for regenerative heating in semiconductor processing systems to maintain optimal temperatures for efficient operation.
Benefits: - Improved temperature control in plasma-based processing chambers - Enhanced efficiency in semiconductor manufacturing processes - Extended lifespan of foreline components
Commercial Applications: Title: Regenerative Heating System for Semiconductor Processing This technology can be utilized in semiconductor fabrication facilities to enhance the performance and longevity of processing equipment, leading to increased productivity and cost savings in the industry.
Prior Art: Prior research in semiconductor processing systems and regenerative heating technologies can provide valuable insights into the development and implementation of this innovation.
Frequently Updated Research: Ongoing research in semiconductor manufacturing and plasma-based processing technologies may offer new advancements and applications for regenerative heating systems in the industry.
Questions about Semiconductor Processing Systems: 1. How does regenerative heating benefit semiconductor manufacturing processes? Regenerative heating helps maintain optimal temperatures in processing chambers, improving efficiency and product quality.
2. What are the key components of a foreline regenerator in semiconductor processing systems? The foreline regenerator includes a regenerator shell, heat transfer fluid input and output, and connections to the processing chamber.
Original Abstract Submitted
Semiconductor processing systems and system components are described for providing regenerative heating to a foreline component. A system includes a plasma-based processing chamber. The processing chamber includes one or more fluid paths configured to circulate a heat transfer fluid. The system also includes one or more vacuum systems configured to exhaust process gases from the processing chamber, the one or more vacuum systems including one or more vacuum pumps and a foreline vent. The system includes a foreline regenerator. The foreline regenerator includes a regenerator shell at least partially surrounding the foreline vent, the regenerator shell including a heat transfer fluid input and a heat transfer fluid output, wherein the heat transfer fluid input is coupled to an output of the processing chamber.
