18206847. CCP GAS DELIVERY NOZZLE simplified abstract (Applied Materials, Inc.)
Contents
CCP GAS DELIVERY NOZZLE
Organization Name
Inventor(s)
Yogananda Sarode Vishwanath of Bangalore (IN)
Andrew Nguyen of San Jose CA (US)
Tom K. Cho of Los Altos Hills CA (US)
CCP GAS DELIVERY NOZZLE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18206847 titled 'CCP GAS DELIVERY NOZZLE
The patent application discusses structures, methods, and systems for additive manufacturing of components of source and gas delivery nozzle assembly.
- A unitary gas distribution nozzle assembly is described, consisting of an upper electrode portion, a lower electrode portion, multiple joining structures, and gas zone divider walls.
- The unitary gas distribution nozzle assembly is made of a single material and is designed to transfer RF energy and thermal energy between the upper and lower electrode portions.
- The gas zone divider walls separate the region between the upper and lower electrode portions into two or more plenum chambers.
Potential Applications: - Additive manufacturing processes in the production of gas delivery systems. - Industrial applications requiring precise gas distribution and control.
Problems Solved: - Simplifying the manufacturing process of gas delivery components. - Enhancing the efficiency and performance of gas distribution systems.
Benefits: - Improved precision and control in gas delivery processes. - Cost-effective manufacturing of complex gas delivery components.
Commercial Applications: Gas distribution systems for semiconductor manufacturing, aerospace applications, and medical device production.
Questions about the technology: 1. How does the unitary gas distribution nozzle assembly improve the efficiency of gas delivery systems? 2. What are the potential cost savings associated with using additive manufacturing for gas delivery components?
Original Abstract Submitted
Example structures, methods, and systems for additive manufacturing of components of source and gas delivery nozzle assembly are disclosed. One example structure includes a unitary gas distribution nozzle assembly that includes an upper electrode portion and a lower electrode portion joined by multiple joining structures, and one or more gas zone divider walls positioned between the upper electrode portion and the lower electrode portion. The unitary gas distribution nozzle assembly is of a single material. Each of the multiple joining structures is positioned between the upper electrode portion and the lower electrode portion. Each of the multiple joining structures is configured to transfer radio-frequency (RF) energy and thermal energy between the upper electrode portion and the lower electrode portion. The one or more gas zone divider walls are configured to separate a region between the upper electrode portion and the lower electrode portion into two or more plenum chambers.
