18144622. ILLUMINATION CORRECTION APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
Contents
ILLUMINATION CORRECTION APPARATUS
Organization Name
Inventor(s)
Donghyeong Kim of Suwon-si (KR)
Kyungbin Park of Suwon-si (KR)
ILLUMINATION CORRECTION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 18144622 titled 'ILLUMINATION CORRECTION APPARATUS
Simplified Explanation
The patent application describes an illumination correction apparatus for correcting a radiation beam incident on a reticle from an exposure apparatus.
- Plurality of fingers with surfaces facing the incident direction of the radiation beam
- Fingers arranged in a first direction adjacent to the beam path
- Fingers can adjust the amount of incident radiation beam by moving in a second direction
- Controller connected to fingers to control their movement for uniform intensity of the radiation beam
- At least one optical sensor on the surface of a finger to measure the intensity of the radiation beam
- Potential Applications
- Semiconductor manufacturing
- Lithography processes
- Optical systems
- Problems Solved
- Ensures uniform intensity of the radiation beam on the reticle
- Improves accuracy and consistency in exposure processes
- Benefits
- Enhanced quality of semiconductor devices
- Increased efficiency in manufacturing processes
- Reduction in defects and errors in lithography processes
Original Abstract Submitted
An illumination correction apparatus for correcting a radiation beam incident on a reticle from an exposure apparatus includes a plurality of fingers each having a surface facing an incident direction of the radiation beam, the plurality of fingers being arranged in a first direction to be adjacent to a path of the radiation beam, and configured to adjust an amount of the incident radiation beam by moving in a second direction, intersecting the first direction, a controller connected to the plurality of fingers and configured to control movement of the plurality of fingers such that an intensity of the radiation beam has uniformity in the first direction, at least one optical sensor on the surface of at least one finger of the plurality of fingers, and a measurement unit configured to measure, based on an output of the at least one optical sensor, the intensity of the radiation beam.
